
73LJ-V7000_COM_RM_E
• Position correction settings
<Dual head mode>
Type:10h~1Fh (10h:Program NO.0, 11h:Program NO.1,
・・・ , 1F:Program NO.15)
Category:04h, Item:01h
Target1~4:00h
byte Setting Data
0
Dual head mode:
0:OFF, 1:ON
1 Reserved (fixed as 0)
2 Reserved (fixed as 0)
3 Reserved (fixed as 0)
Note: This setting is not used when one sensor head.
<Dual head mode target head>
Type:10h~1Fh (10h:Program NO.0, 11h:Program NO.1,
・・・ , 1F:Program NO.15)
Category:04h, Item:02h
Target1~4:00h
byte Setting Data
0 Correction target head: 0:headA, 1:headB
1 Reserved (fixed as 0)
2 Reserved (fixed as 0)
3 Reserved (fixed as 0)
Note: This setting is not used when one sensor head.
<Dual head mode X/Z correction amount>
Type:10h~1Fh (10h:Program NO.0, 11h:Program NO.1,
・・・ , 1F:Program NO.15)
Category:04h, Item:03h (X correction amount), 04h (Z
correctionamount)
Target1~4:00h
byte Setting Data
0
Correction amount: -10000.0~+10000.0mm
(0.001μm unit, Sined 32-bit integer
example:1mm=100000, 2mm=200000)
1
2
3
Note: This setting is not used when one sensor head.
<θcorrection ON/OFF><Backup correction ON/OFF>
Type:10h~1Fh (10h:Program NO.0, 11h:Program NO.1,
・・・ , 1F:Program NO.15)
Category:04h, Item:05h (θ correctionON/OFF), 07h
(preliminary correctionON/OFF)
Target1:00h (headA/wide), 01h (headB)
Target2:00h (Position correction1), 01h (Position
correction2), Target3~4:00h
byte Setting Data
0 ON/OFF: 0:OFF, 1:ON
1 Reserved (fixed as 0)
2 Reserved (fixed as 0)
3 Reserved (fixed as 0)
<θcorrection detail>
Type:10h~1Fh (10h:Program NO.0, 11h:Program NO.1,
・・・ , 1F:Program NO.15)
Category:04h, Item:06h (θcorrectionON/OFF)
Target1:00h (headA/wide), 01h (headB)
Target2:00h (position correction1), 01h (position
correction2), Target3~4:00h
byte Setting Data
0
Linear calculation area: 0:Area 2 disabled, 1:Area2
enabled
1 Reserved (fixed as 0)
2 Reserved (fixed as 0)
3 Reserved (fixed as 0)
4
Linear calculation area1 Left: any value in
measurement range
(0.01μm unit Sined 32-bit integer
example: 5mm=500000)
5
6
7
8
Linear calculation area1 Right: any value in
measurement range
(0.01μm unit Sined 32-bit integer
example: 5mm=500000)
9
10
11
12
Linear calculation area2 Left: any value in
measurement range
(0.01μm unit Sined 32-bit integer
example: 5mm=500000)
13
14
15
16
Linear calculation area2 Right: any value in
measurement range
(0.01μm unit Sined 32-bit integer
example: 5mm=500000)
17
18
19
20 Correction standard: 0:Horizontal,1:MasterProfile
21 Reserved (fixed as 0)
22 Reserved (fixed as 0)
23 Reserved (fixed as 0)
<preliminary correction detail><Xcorrection detail>
Type:10h~1Fh (10h:Program NO.0, 11h:Program NO.1,
・・・ , 1F:Program NO.15)
Category:04h, Item:08h (preliminary correctiondetail), 0Bh
(Xcorrectiondetail)
Target1:00h (headA/wide), 01h (headB)
Target2:00h (position correction1), 01h (position
correction2), Target3~4:00h
byte Setting Data
0
Edge measuring area Left: any value in
measurement range
(0.01μm unit Sined 32-bit integer
example: 5mm=500000)
1
2
3
4
Edge measuring area Right: any value in
measurement range
(0.01μm unit Sined 32-bit integer
example: 5mm=500000)
5
6
7
8 Edge direction: 0:Rising, 1:Falling
9 Detaction direction: 0:+direction, 1:–direction
10 Detection No: 1~10
11 Reserved (fixed as 0)
12
Edge level: any value in measurement range
(0.01μm unit Sined 32-bit integer
example: 5mm=500000)
13
14
15
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